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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 0,08 ml/min (Water), 0,5 ml/min (IPA) | 5% or 0,15% FS (water), 20% or 1% FS (IPA) *1 | Water, IPA | 30bar | I2C | UNF 1/4-28 flat-bottom ports for 1/16" or 1/8" OD | 4...12V | +10...+50°C | *1 Whichever error is larger |
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Manufacturer
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LG16D | Liquid Flow Meter | 1 ml/min (Water), 10 ml/min (IPA) | 5% or 0,2% FS (water), 20% or 1% FS (IPA) *1 | Water, IPA | 15bar | I2C | UNF 1/4-28 flat-bottom ports for1/16" or 1/8" OD tubing | 4...12V | +10...+50°C | *1 Whichever error is larger, water |
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Manufacturer
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LG16D | Liquid Flow Meter | 5 ml/min | 5% or 0,2% FS *1 | Water | 15bar | I2C | UNF 1/4-28 flat-bottom ports for1/16" or 1/8" OD tubing | 4...12V | +10...+50°C | *1 Whichever error is larger, water |
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Manufacturer
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LS32 | Liquid Flow Meter | 40 ml/min | 5% or 0,25% FS *1 | Water | 12bar | I2C | 1/4-28 flat bottom 1/8ö OD tubing | 5V | +5...+50°C | *1 Whichever error is larger |
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SCC1 | Liquid Flow Meter Accessory | - | n/a | - | - | I2C/0...10V | - | 12...36V | - | - |
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n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a |
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SCC1 | Liquid Flow Meter Accessory | - | n/a | - | - | I2C/RS485 | - | 12...36V | - | n/a |
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Manufacturer
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SFC5400 | Mass Flow Controller for Gases | 50, 100, 200, 500 sccm, 1, 2, 5, 10, 20, 50, 100 slm | - | - | - | RS485, DeviceNet, IO-Link (optional), analog voltage / current | Downmount, Swagelok, VCR, VCO, W-Seal | 14...26V | 0...+50°C | - |
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Manufacturer
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SFC5500 | Mass Flow Controller for Gases | 10slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | RS485, DeviceNet | Legris 6mm | 15...24V DC | 0...+50°C | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
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SFC5500 | Mass Flow Controller for Gases | 200slm | 1% or 0,1% FS *1 | Air/N2 | 7 bar Gauge, 5 bar Differential | RS485, DeviceNet | Legris 10mm | 15...24V DC | 0...+50°C | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
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SFC5500 | Mass Flow Controller for Gases | 2slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | RS485, DeviceNet | Legris 6mm | 15...24V DC | 0...+50°C | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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SFC5500 | Mass Flow Controller for Gases | 50sccm | 2% or 0,2% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | RS485, DeviceNet | Legris 6mm | 15...24V DC | 0...+50°C | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
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SFM3xxx | Mass Flow Meter for Gases | ±200slm | 1,5% or 0,05slm *1, Typ. | Air, N2, O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 5V | -20...+80°C | *1 Whichever error is larger |
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Manufacturer
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SFM3xxx | Mass Flow Meter for Gases | ±200slm | 1,5% or 0,05slm *1, Typ. | Air, N2, O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 5V | -20...+80°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -150...300slm | 2,5...3% or 0,05slm *1, Typ. | O2, Air and mixtures of Air/O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | -20...+85°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -150...300slm | 2,5...3% or 0,05slm *1, Typ. | O2, Air and mixtures of Air/O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | -20...+85°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -30...300slm | 2...2,5% or 0,05slm | O2, Air and mixtures of Air/O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | -20...+85°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -30...300slm | 2% or 0,05slm *1, Typ. | O2, Air and mixtures of Air/O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | -20...+85°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -30...300slm | 2% or 0,1slm (Air), 2...7% or 0,1% FS (HeOx) *1, Typ. | O2, Air, mixtures of Air/O2, HeOx, mixtures O2/HeOx | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | -20...+85°C | *1 Whichever error is larger |
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SFM3xxx | Mass Flow Meter for Gases | -10...240slm | 2...3% or 0,05slm *1, Typ. | Air, O2 | 0,7...1,3bar Absolute | I2C | 22mm cone/22mm cone, ISO5356 | 2,7...5,5V | 0...+60°C | *1 Whichever error are larger |
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SFM3xxx | Mass Flow Meter for Gases | -10...160slm | 2...3% or 0,05slm *1, Typ. | Air | 0,7...1,3bar Absolute | Analog voltage, 10...90% Vdd | 22mm cone/22mm cone, ISO5356 | 5V | 0...+60°C | *1 Whichever error are larger |
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SFM | Mass Flow Meter for Gases | -24...240slm | 2,5...4,5% ±0,02slm, Typ. | Air | 0,6...1,07bar Absolute | Analog 0,095...2,45V | 19mm/19mm | 5V | +5...+60°C | - |
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SFM3100 | Mass Flow Meter for Gases | -10...240slm | 2...5% ±0,02slm, Typ. | Air, O2 and mixtures of Air/O2 | 0,7...1,3bar Absolute | I2C | 19mm/19mm | 2,7...5,5V | +5...+60°C | - |
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SFM3xxx | Mass Flow Meter for Gases | -100...250slm | 2...7% ±0,05slm, Typ. | Air | 0,6...1,07bar Absolute | I2C | 22mm cone/22mm socket, ISO5356 | 5V | +10...+50°C | - |
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SFM3xxx | Mass Flow Meter for Gases | -250...250slm | 2,3% ± 0,1slm @ flow < 100 slm. Typ. | Air | 540...1140 hPa | I2C | 15mm cone 22mm socket/22mm socket 15mm cone, ISO5356 | 3,15...3,45V | 5...+50°C | - |
