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Manufacturer
SENSIRION
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SFC5500 | Mass Flow Controller for Gases | 50sccm | 2% or 0,2% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
SENSIRION
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SFM3xxx | Mass Flow Meter for Gases | -150...300slm | 2,5...3% or 0,05slm *1, Typ. | O2, Air and mixtures of Air/O2 | 0,7...1,3bar Absolute | 22mm cone/22mm cone, ISO5356 | I2C | -20...+85°C | 2,7...5,5V | *1 Whichever error is larger |
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Manufacturer
SENSIRION
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SFM3xxx | Mass Flow Meter for Gases | -10...240slm | 2...3% or 0,05slm *1, Typ. | Air, O2 | 0,7...1,3bar Absolute | 22mm cone/22mm cone, ISO5356 | I2C | 0...+60°C | 2,7...5,5V | *1 Whichever error are larger |
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Manufacturer
SENSIRION
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SFM3xxx | Mass Flow Meter for Gases | -10...160slm | 2...3% or 0,05slm *1, Typ. | Air | 0,7...1,3bar Absolute | 22mm cone/22mm cone, ISO5356 | Analog voltage, 10...90% Vdd | 0...+60°C | 5V | *1 Whichever error are larger |
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Manufacturer
SENSIRION
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SFM3xxx-AW/D | Mass Flow Meter for Gases | ±33slm | 3% ±0,02slm | Air | 0,54...1,1bar Absolute | 15mm Cone/15mm Socket, ISO 5356 | I2C | +5...+50°C | 5V | Autoclavable |
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Manufacturer
SENSIRION
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SFM3xxx-AW/D | Mass Flow Meter for Gases | ±33slm | 3% ±0,02slm | Air | 0,54...1,1bar Absolute | 15mm Cone/15mm Socket, ISO 5356 | I2C | +5...+50°C | 5V | Single use |
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Manufacturer
SENSIRION
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SFM4100 | Mass Flow Controller for Gases | 20slm | 3% or 0,15% FS *1, (0...50-C) | O2 | 6bar Gauge | Legris Carstick 6mm | I2C | -20...+80°C | 3,5 - 9V | *1 Whichever error is larger |
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Manufacturer
SENSIRION
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SFM4300 | Mass Flow Meter for Gases | 0...20slm | ±2% ±0,005 slm (Typ., Air, O2) | O2, Air, N2O, CO2, Air/O2 mixture, N2O/O2 mixture, CO2/O2 mixture | 0,66...7bar Absolute | Basemount | I2C | +5...+50°C | 3...5,5V | - |
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Manufacturer
SENSIRION
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SFM4300 | Mass Flow Meter for Gases | 0...20slm | ±2% ±0,005 slm (Typ., Air, O2) | O2, Air, N2O, CO2, Air/O2 mixture, N2O/O2 mixture, CO2/O2 mixture | 0,66...7bar Absolute | O-rings | I2C | +5...+50°C | 3...5,5V | - |
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Manufacturer
SENSIRION
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SFM4300 | Mass Flow Meter for Gases | 0...50slm | ±2,1% ±0,006 slm (Typ., Air, O2, 0...20slm) | Air, O2, other gases and mixtures on request for OEM projects | 0,66...7bar Absolute | Basemount | I2C | +5...+50°C | 3...5,5V | - |
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Manufacturer
SENSIRION
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SFM4300 | Mass Flow Meter for Gases | 0...50slm | ±2,1% ±0,006 slm (Typ., Air, O2, 0...20slm) | Air, O2, other gases and mixtures on request for OEM projects | 0,66...7bar Absolute | O-rings | I2C | +5...+50°C | 3...5,5V | - |
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Manufacturer
SENSIRION
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SFM5500 | Mass Flow Meter for Gases | 0,5slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 10bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
SENSIRION
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SFM5500 | Mass Flow Meter for Gases | 10slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 10bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
SENSIRION
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SFM5500 | Mass Flow Meter for Gases | 2slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 10bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
SENSIRION
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SFM5500 | Mass Flow Meter for Gases | 50sccm | 2% or 0,2% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 10bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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Manufacturer
SENSIRION
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SLQ | Liquid Flow Meter | 120ml/min | 10% (@ 3...120 ml/s) | IPA | 12bar | Super 300 Type Pillar Fitting 4x3mm | I2C | +20...+25°C | 4,5...5,5V | - |
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Manufacturer
SENSIRION
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LG01 | Liquid Flow Switch | 0,25ml/min | 10% of switch point | Water | 3bar | 1/4 flat-bottom for 1/16ö or 1/8ö OD plastic tubing | - | +10...+50°C | 5V | n/a |
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Manufacturer
SENSIRION
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LG01 | Liquid Flow Switch | 4,5ml/min | 10% of switch point | Water | 3bar | 1/4 flat-bottom for 1/16ö or 1/8ö OD plastic tubing | - | +10...+50°C | 5V | n/a |
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Manufacturer
SENSIRION
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LG16/LG01 | Liquid Flow Meter Accessory | - | n/a | - | - | - | - | - | - | - |
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Manufacturer
SENSIRION
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LG01 | Liquid Flow Meter Accessory | - | n/a | - | - | - | - | - | - | - |
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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 7ul/min | 5% or 0,3% FS (water), 20% or 0,3% FS (IPA) *1 | Water, IPA | 200bar | UNF 6-40 for 1/32ö OD tubing | I2C | +10...+50°C | 4...12V | *1 Whichever error is larger |
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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 80ul/min | 5% or 0,15% FS (water), 20% or 1% FS (IPA) *1 | Water, IPA | 100bar | UNF 6-40 for 1/32ö OD tubing | I2C | +10...+50°C | 4...12V | *1 Whichever error is larger |
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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 80ul/min | 5% or 0,15% FS (water), 20% or 1% FS (IPA) *1 | Water, IPA | 30bar | UNF 1/4-28 flat-bottom ports for 1/16ö or 1/8ö OD | I2C | +10...+50°C | 4...12V | *1 Whichever error is larger |
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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 1000ul/min | 5% or 0,2% FS (water), 20% or 1% FS (IPA) *1 | Water, IPA | 15bar | UNF 1/4-28 flat-bottom ports for1/16ö or 1/8ö OD tubing | I2C | +10...+50°C | 4...12V | *1 Whichever error is larger, water |
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Manufacturer
SENSIRION
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LG16D | Liquid Flow Meter | 10000ul/min | 5% or 0,2% FS *1 | Water | 15bar | UNF 1/4-28 flat-bottom ports for1/16ö or 1/8ö OD tubing | I2C | +10...+50°C | 4...12V | *1 Whichever error is larger, water |
